F-RadiMo Radical Monitor "SP Type-RadiMo"
Absolute density measurement of fluorine radicals using vacuum ultraviolet absorption spectroscopy! Various applications for measurement as well.
The "SP-type RadiMo" is a device that can measure the absolute density of fluorine radicals in their ground state using absorption spectroscopy. The spectrum of the probe light emitted from the light source is calibrated with high precision. Additionally, it can measure in both emitting and non-emitting plasma. The F-RadiMo can be installed on the port of a process device for measurement. 【Features】 ■ Measurement of the absolute density of fluorine radicals ■ Capable of measuring in both emitting and non-emitting plasma ■ No calibration required for absolute density calculation ■ F-RadiMo can be installed on the port of a process device for measurement ■ Various measurement applications *For more details, please refer to the PDF document or feel free to contact us.
- Company：片桐エンジニアリング
- Price：Other
